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Chapter 11: Alignment and Precision Engineering

As I said in the first chapter, I hope to make these articles into a book on alignment after significant editing to organize the material coherently. In that spirit, and before I forget, let me discuss some aspects of alignment and precision engineering that belong in a Preface or Introduction to the book rather than here. My motivation is returning from a meeting of the American Society for Precision Engineering, where I took a tutorial on alignment from Vivek Badami of Zygo and Eric Buice from Lawrence Berkeley National Laboratory. You might ask why since I am writing on this subject, but everyone views alignment from a different perspective, and there are aspects of the subject that you might never have thought of but are essential to others. For example, Eric is interested in the alignment of magnets in an accelerator using a wire as the detector of the axis of the magnetic field.

From the alignment tutorial and papers at the meeting, a couple of principles of precision engineering stand out. How well you can make measurements depends on the environment you are working in. At least three significant causes of disturbance exist: thermal effects, vibration, and air turbulence. To give concrete examples, I have attached a paper written several years ago about a large machine tool that illustrates these effects nicely. For each category, I refer to the illustration in the paper. For the details, please see the paper itself.

Thermal effects cause dimensional changes in most materials, and at the µm level and below, people worry about temperature changes of millidegrees. These dimensional changes cause drift and a lack of repeatability. The first example in the paper deals with the lights in the room where the machine was installed. Being conservation-minded folks, we turned the light off in the evening and back on when we got to work in the morning. Unfortunately, this caused an 18 µm change between the tool and workpiece and took most of the workday to stabilize. We just left the lights on all the time, as in Figure 3.

Figure 4 in the paper shows that 0.1° F. change in room temperature will cause a damped reduced temperature of the steel in the machine. The nominal control of the room temperature to 0.02° for several hours was enough to make this a minor contributor to machine errors.

The biggest thermal effect was running the machine spindle. It elongated by 0.5 mm over a 20-hour period. Again, leaving the spindle running except for changing wheels was the only solution, as in Fig 5. In general, thermal effects are categorized as systematic effects; they are relatively long-term effects compared to the time needed to correct for the effect by some feedback mechanism.

In the vibration category, we usually think of seismic vibration coming up through the floor and forget about acoustic vibration. However, even when taking precautions, as shown in Fig. 2, it pays to stay off isolated foundations and avoid touching isolated optical tables during experiments. Leave your laptop off the table and as far away from the experiment as possible. It is a source of vibration and thermal effects.

Acoustic vibrations also have consequences. While I can’t document this, I remember watching a part being diamond-turned at Oak Ridge National Laboratory. They had a claxon to signal for an incoming phone call.  You could see the change in the part’s surface finish from several feet away when the claxon sounded. In another case, having flooring too near the underside of an isolated optical table is a problem. Walking on the floor transfers deflections in the floor to the table because the air between couples the flooring to the table. Here I speak from experience. Opening the gap a couple of inches fixed the problem. The effect of both kinds of vibration combines systematic and statistical noise. Sometimes isolating your experiment from the environment is easy, but just when you think you have it isolated, another source of vibration pops up.

Anyone who has used an interferometer is aware of air turbulence. The irregular change in the shape of the fringes is a sure sign of turbulence. It is also visible in the image using an autostigmatic microscope (ASM). The image’s centroid will dance around, and the flair around the edges of a well-focused spot will change. This type of noise is largely statistical, and the practical method of reducing statistical noise is through averaging. One area of precision engineering that has made large steps here is the astronomical community, which combines wavefront sensing and deformable correction optics to improve the images of stars and galaxies dramatically.

This thought brings me to another impediment to precision, at the µm level, everything is deformable, and to first order, all materials should be considered rubber. Fig. 6 in the paper is a beautiful example.

The ways along which the tool spindle moved were ground steel blocks with a cross-section of 50 by 150 mm. As the spindle moved past the bolts that held the ways together, there was a roughly 10 µm bulge every 150 mm due to over-tightened bolts. Loosening the bolts largely corrected this straightness error. Since the stiffness of plates varies as the thickness cubed, it is easy to see why the least stress will distort thin plates such as lenses and mirrors.

This is probably enough on the difficulty of doing precision work, but it leads to a topic I want to discuss in the next chapter, once you have aligned a system, how do you secure the alignment? The tutorial I attended had a good discussion of this topic, and I will share some of their thoughts in the next installment.

Chapter 10: Index of Refraction and Lens Conjugates        

This Chapter is a little out of order but illuminates a topic we have hinted at in previous Chapters, how does the index of refraction affect the lens conjugates we see when doing centration? The immediate interest came from a call I got because some glass apparently got mixed up in a batch of identical lenses. Could I determine which was made of the correct glass? If you are set up to do centering with an optical centering sensor such as an autostigmatic microscope (ASM), the answer is almost always yes. There will be cases where it is impossible for one reason or another, but usually, it is no problem. Note that the same procedure works with an interferometer.

The diagram in Fig. 1 shows the four conjugates you can usually access with an ASM, the green feature being the end of the microscope objective. Notice that these four conjugates allow you to solve for the four first-order lens parameters, the 2 radii, the thickness, and the index.

Fig. 1 The four lens conjugates are usually accessible using an autostigmatic microscope.

The leftmost picture shows zeroing the vertical height scale of the ASM on the Cat’s eye reflection from the lens’s upper surface, R2. Once the scale is zeroed, the ASM is lowered in the next picture to pick up the center of curvature of R2. If R2 has a long radius, measuring this conjugate may not be possible. The downward motion of the ASM is recorded as a negative distance and matches the normal sign convention for surface radii. If R2 is concave, the center of curvature is above the surface, and R2 is positive.

The middle picture is the measurement used to find the index of the glass. The distance, to, will always be negative and may be below R1 if R2 is sufficiently concave. The next picture shows finding the center of curvature of R1. Again, Ro1 may be either sign depending on the curvature of R1, but the distance the ASM moves matches the sign convention of being positive when above the surface.

Finally, if a plane mirror is placed behind the lens, we can find the back focal length (BFL), which may be either positive or negative depending on the 2 radii. In these last 2 cases, the distances may be out of reach with negative lenses. The good news is that if the lens is turned over, most previously inaccessible conjugates are now accessible.

The pictures are ordered toward a more complicated formula for finding the conjugate. Left most we just set our scale to zero. The radius of R2 is confocal, so no calculation is needed; the measurement is independent of any other lens parameter. Obviously, the objective must have a long enough working distance to reach the center of curvature. When this is not the case, turning the lens over and measuring from the other side may solve this problem.

The optical thickness is

where tp is the physical thickness of the lens, and 3 of the 4 lens parameters are used. This can be turned around to give the index as

Notice this formula gives the same index n either way the lens is facing because to and R2 both change when the lens is inverted. This gives 2 measures of the index from one lens. Also recognize that in the limit of large R2, that is, a plane window, the formula reduces to n = tp/to just as we expect.

To find the optical center of curvature of R1 it requires all 4 lens parameters.

Notice that odd things happen if R1, the surface farthest from the ASM, is plane. This formula says that the optical radius of R1,in the limit as R1 goes to infinity, is

This is the same as the back focal length, BFL, and the EFL for a plano-convex or concave lens when the plano side is farthest from the ASM. In practice, there is one focused spot behind the lens where we cannot tell the difference between the three. This is less confusing when we remember we are not measuring the physical radius of curvature but rather where the center of curvature of R1 appears relative to the vertex of R2. R1 must be substantially non-plane before the three spots are separated enough axially to distinguish between the EFL, BFL and optical radius of R1.

Finally, the BFL also uses all four lens parameters.

The reason for calculating Ro1 and BFL is that once you have found the index, you can substitute the index in these formulas and see if you get these conjugates when you measure the lens as a double check on the index, and to see if you have made any mistakes (particularly, sign errors) along the way.

While I was prompted to write this Chapter because of a concern with the index of refraction, you can see the direct association with alignment. For every lens added to an assembly, you can pick up these four conjugates unless they happen to be too large to reach with the hardware available in either direction relative to the zero of the surface nearest the alignment sensor. Obviously, the more lenses in an assembly, the more surfaces and centers of curvature are going to show up as you scan through the lens axially. This is why it is good practice to have a list of conjugates of a correctly assembled lens before inspecting it. If you do not have such a list, it is difficult to know which spot is reflected from what conjugate.

[Sidebar – There is a second method of finding the axial location of the center of curvature of a surface that is particularly useful when using a lens design program. Rays reflecting from the surface in question are normal to the surface to focus at a point. According to Snell’s Law of Refraction nsin(Ø) = n’sin (Ø’) where Ø and Ø are measured relative to the normal of the surface. The Law means that Ø’ is zero for rays normal to the surface. If n = 0, then Ø’ is 0.

This observation is helpful because to find the location of a surface’s reflected center of curvature; the designer must enter all the surfaces between the sensor and the reflecting surface twice. The n = 0 method is single pass approach for a source at any distance from the surface on to the sensor as long as n = 0 just prior to the surface. Simulating the suitability of any reflecting test is easy. After finding a suitable solution, the system is modeled in double pass to verify a correct design. Try the method. You will be amazed how much easier it is to do this than set up a double pass test.

I cannot take credit for this idea. I believe I heard it from Jim Burge, and I suspect he heard it from Roland Shack.]

Systematic method of alignment using aberrations

ABSTRACT: Talk is largely tutorial by has a two-fold motivation Definitions of kinds of alignment
Initial alignment steps to get light into alignment sensor-autostigmatic microscope, alignment telescope or interferometer Systematic alignment steps using the alignment sensor. Good idea to have a written procedure because many steps Alignment results using real hardware.

Robert E. Parks, Benjamin F. Anjakos

Optical Perspectives Group, LLC Tucson, AZ 85750
Steward Observatory, Univ. of Arizona Tucson, AZ 85721

Optomechanical Engineering 2023 SPIE Optics and Photonics
20-25 August 2023

Background and motivation

  • Work on a project where alignment was critical
  • Discussions with optical engineers without much hands-onexperience in alignment, had little idea of how well they couldposition hardware – saw need for a procedure
  • Connection between image symmetry and kinematics of alignment
  • Writing a blog on alignment that might become a book
  • Awareness of new software to make alignment more quantitative

(My) definitions of alignment

Hard alignment – uses centers of curvature, reticles at vertices and foci
Reflected centroid identified to the ± 1 μm level in 3 degrees of freedom (DOF)

Soft alignment – centering the test wavefront on the aperture of the article under test Usually fine if centered to a couple of degrees, often eyeball is good enough

Alignment with aberrations – centers of curvature and vertices difficult/impossible to reach optically

Forced to rely on aberrations for alignment

3 degrees of freedom (DOF)

5 DOF – 3 at focus, 2 at flat

Initial steps to get light into alignment sensor

  • Set the x-y axis origin of the sensor using a Cat’s eye reflection
  • Provide mounts with sufficient range of motion and DOF for alignment
  • Position mounts with elements as close as possible mechanically
  • Use a low power objective or reduce aperture of transmission sphere initially
  • Adjust point source of light to produce expected behavior on first reflection
  • Adjust return mirror to center reflected beam on sensor aperture
  • Adjust return beam focus to outgoing focus
  • Perform systematic alignment using quantitative feedback from sensor

Set x-y axis origin in sensor

To eliminate retrace error the reflected path must overlay the outgoing path

This is effectively boresighting the alignment sensor

Use a Cat’s eye reflection from a specular surface at the focus of the sensor Interferometers have built in functions to help with this, rotation serves this purpose with

alignment telescopes and autostigmatic microscopes centroid electronically
Tilt fringes in an interferometer are the analog of an image being decentered in an AT or ASM

Mounts for optical elements

Mounts must have the necessary DOF to achieve alignment, but no more than necessary

Too many adjustments make alignment confusing

Mounts need the necessary range of travel but be sensitive to adjustment at alignment level May need actuators if touching by hand introduces unacceptable errors


Adjust mounts to mid-travel range, if possible, before screwing to table

Mounts must be stable, screwed to table – stacks must be kinematically secure Use spacers at 3 points to assure kinematic stability

Locate mounts precisely mechanically

If possible, make optical axis of the alignment setup parallel to table top
The centers of all apertures are the same height to 1 mm or less
As the axis height reference, use the component with the least flexibility to adjust

An interferometer would be a good example of inflexibility Use the tapped holes as a guide in the plane of the table

Use a plastic ruler to help position mounts

Don’t be afraid to use a Sharpie to mark locations – it wipes off with alcohol Add mounts one at a time starting at the source to get optical path started correctly

Alignment is paraxial – use low NA beam initially

Just as when using a microscope, start with the least powerful objective
Find area of interest, and switch to higher power while keeping object centered

Easy to start with a low power objective with an ASM because objectives are parfocal Transmission sphere are not parfocal, use one that overfills the aperture Lower the NA by masking the transmission sphere

Once alignment is reasonably good, change objectives and remove mask to fill aperture Using aberrations forces the use of the full aperture

Keep components as close together as possible

As in the picture keep the flat close, initially
This reduces the beam translation due to small angular errors in alignment
Once source and parabola well aligned, flat can be moved away because alignment is fixed

If return mirror has power, it must be located at the proper spacing
Using the low power objective or stopped aperture helps in this case

page10image31202624

Adjust source relative to the first surface

Before adding the flat, look at the reflected beam for collimation and symmetry Use a bright source and white card to view the reflected beam
Since it is a parabola, the beam should remain reasonably well collimated

If not, adjust source distance from parabola until it is Reflected beam cross section should be round moving away from the parabola

If not, move the source in x-y to improve roundness

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Adjust the return mirror to follow the beam back to source

With the return mirror in place, adjust it in tip/tilt to make the reflected beam follow the outgoing Probe the edges of the beam and tilt the mirror to overlap the 2 beams

If the alignment is anywhere close the reflected image should be near the outgoing focused spot Leave a little lateral misalignment to find the return image
Adjust focus of return spot to the same plane as the outgoing spot

Finally, overlap the images and the return image should be visible in the alignment sensor

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Adjust the return mirror to center image

This is the beginning of the quantitative alignment
First adjust the return mirror, or the alignment sensor to center the spot on the crosshair Adjust focus to what appears best focus and adjust camera gain to 1/3 total range

Want to avoid saturated pixels at best focus when well aligned

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Alignment methodology

Must keep image centered on crosshair to avoid retrace error
Means making compensating tilt and decenter adjustments to reduce image size Along with keeping sensor adjusted for best focus

With the 90° parabola the main aberration is astigmatism First alignment step is to check for best focus Astigmatism rotates 90° on either side of best focus Check sign or orientation of astigmatism with focus

Good idea to have written procedure and to make notes Next chart shows alignment steps

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Change in Zernike coefficient with alignment step

Change in alignment and image with each step

Alignment using real hardware and image symmetries

Concluding observations about the images

Obviously diamond turned surface – horizontal diffraction patten (Oversaturated to show diffraction)

Irregularly shaped image indicates mid-spatial frequency errors

Conclusions about alignment with aberrations

Showed some simple methods of making initial alignment easier

Showed making compensating adjustments keeping image centered

Showed how 5 adjustments match 1:1 with 5 image symmetries

Showed how image symmetries guide which adjustment

Showed sensitivity of image characteristics to alignment

References

Parks, R. “Using image symmetries to uniquely align aspheric mirrors to a focus and axis”, Proc. SPIE, 12222, pp. 24-32 (2022).